| | Laser & Beam Delivery
| | Enhanced quality image plane objectives | | Automatic edge lock accuracies better than 50 nm | | Imaging features less than .2 microns | | Cutting line widths less than .1 micron | | Programmable object turret with multiple objectives for processing and navigation on photomask | | Auto-focus sets focus to within .2 microns even on MOSI masks | | Deposition Mode |
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| | Workstation
| | Clean Room compliant Class i enclosure | | Pressure sensitive joystick for mask navigation | | Ultra fine thumbwheel focus override | | Available mask Auto Loader and Mini-Environment |
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| | Advantages
| | Unique Ultrafast Femtosecond Laser | | Image Processing Sub-micron Repairs and Other Machining Applications | | Laser Ablation and CVD | | Repairs without Subtrate Damage, loss of DUV Transmission, Splatter or Edge Roll-up | | Advanced Platform and Motion System provides vibration isolation |
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| | Software Control
| | User friendly | | Special GUI features | | Import options | | File conversion features |
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