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| | | | | | Ablation dominated process – “cold” material removal | | High precision | | Absolutely micro-scale applications | | Material insensitive |
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| | | Machining Quality
| | ns vs fs in hole drilling in stainless steel | |
| | |  | | ns laser |
| | |  | | fs laser |
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| | | | | |  | | 250 µm wide channel in PET |
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| | |  | | 100 µm dia. thru hole in Inconel (no post processing) |
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| | | Molybdenum Mask Fabrication
| | Molybdenum mask processed with femtosecond laser | |
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| | | | Photomask Defect Repair
| | Chromium-on-fused-silica photomasks for deep-ultraviolet photolithography. Chrome layer without damage to underlying glass substrate. Femtosecond Ti:S laser, 400 nm wavelength, 100 fs pulse width. | |
| | | | |  | | Before Repair |
| | |  | | After Repair |
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